@article{CRCHIM_2013__16_1_15_0,
     author = {James Kelly and Charan Surisetty and Donald Canaperi},
     title = {Experimental study of copper leveling additives and their wafer and pattern-scale effect on copper planarization},
     journal = {Comptes Rendus. Chimie},
     pages = {15--20},
     publisher = {Elsevier},
     volume = {16},
     number = {1},
     year = {2013},
     doi = {10.1016/j.crci.2012.03.013},
     language = {en},
}