@article{CRCHIM_2018__21_8_723_0,
     author = {Christophe Cardinaud},
     title = {Fluorine-based plasmas: {Main} features and application in micro-and nanotechnology and in surface treatment},
     journal = {Comptes Rendus. Chimie},
     pages = {723--739},
     publisher = {Elsevier},
     volume = {21},
     number = {8},
     year = {2018},
     doi = {10.1016/j.crci.2018.01.009},
     language = {en},
}