%0 Journal Article
%A Christophe Cardinaud
%T Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment
%J Comptes Rendus. Chimie
%D 2018
%P 723-739
%V 21
%N 8
%I Elsevier
%R 10.1016/j.crci.2018.01.009
%G en
%F CRCHIM_2018__21_8_723_0