TY  - JOUR
AU  - Christophe Cardinaud
TI  - Fluorine-based plasmas: Main features and application in micro-and nanotechnology and in surface treatment
JO  - Comptes Rendus. Chimie
PY  - 2018
SP  - 723
EP  - 739
VL  - 21
IS  - 8
PB  - Elsevier
DO  - 10.1016/j.crci.2018.01.009
LA  - en
ID  - CRCHIM_2018__21_8_723_0
ER  -