@article{CRMECA_2004__332_2_141_0,
     author = {Aziz Ettouhami and Noureddine Zahid and Mourad Elbelkacemi},
     title = {A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response},
     journal = {Comptes Rendus. M\'ecanique},
     pages = {141--146},
     publisher = {Elsevier},
     volume = {332},
     number = {2},
     year = {2004},
     doi = {10.1016/j.crme.2003.10.001},
     language = {en},
}