%0 Journal Article
%A Aziz Ettouhami
%A Noureddine Zahid
%A Mourad Elbelkacemi
%T A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response
%J Comptes Rendus. Mécanique
%D 2004
%P 141-146
%V 332
%N 2
%I Elsevier
%R 10.1016/j.crme.2003.10.001
%G en
%F CRMECA_2004__332_2_141_0