TY  - JOUR
AU  - Aziz Ettouhami
AU  - Noureddine Zahid
AU  - Mourad Elbelkacemi
TI  - A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response
JO  - Comptes Rendus. Mécanique
PY  - 2004
SP  - 141
EP  - 146
VL  - 332
IS  - 2
PB  - Elsevier
DO  - 10.1016/j.crme.2003.10.001
LA  - en
ID  - CRMECA_2004__332_2_141_0
ER  -