%0 Journal Article %A Samira Kaviani %A Mohsen Bahrami %A Amir Monemian Esfahani %A Behzad Parsi %T A modeling and vibration analysis of a piezoelectric micro-pump diaphragm %J Comptes Rendus. Mécanique %D 2014 %P 692-699 %V 342 %N 12 %I Elsevier %R 10.1016/j.crme.2014.06.005 %G en %F CRMECA_2014__342_12_692_0