@article{CRPHYS_2006__7_8_858_0,
     author = {Burn J. Lin},
     title = {Optical lithography{\textemdash}present and future challenges},
     journal = {Comptes Rendus. Physique},
     pages = {858--874},
     publisher = {Elsevier},
     volume = {7},
     number = {8},
     year = {2006},
     doi = {10.1016/j.crhy.2006.10.005},
     language = {en},
}