%0 Journal Article
%A Burn J. Lin
%T Optical lithography—present and future challenges
%J Comptes Rendus. Physique
%D 2006
%P 858-874
%V 7
%N 8
%I Elsevier
%R 10.1016/j.crhy.2006.10.005
%G en
%F CRPHYS_2006__7_8_858_0