@article{CRPHYS_2006__7_8_875_0,
     author = {Kevin Kemp and Stefan Wurm},
     title = {EUV lithography},
     journal = {Comptes Rendus. Physique},
     pages = {875--886},
     publisher = {Elsevier},
     volume = {7},
     number = {8},
     year = {2006},
     doi = {10.1016/j.crhy.2006.10.002},
     language = {en},
}