@article{CRPHYS_2006__7_8_887_0,
     author = {Yorick Trouiller},
     title = {From 120 to 32 nm {CMOS} technology: development of {OPC} and {RET} to rescue optical lithography},
     journal = {Comptes Rendus. Physique},
     pages = {887--895},
     publisher = {Elsevier},
     volume = {7},
     number = {8},
     year = {2006},
     doi = {10.1016/j.crhy.2006.10.001},
     language = {en},
}