@article{CRPHYS_2006__7_8_896_0,
     author = {Carlo Reita},
     title = {Advanced mask manufacturing},
     journal = {Comptes Rendus. Physique},
     pages = {896--909},
     publisher = {Elsevier},
     volume = {7},
     number = {8},
     year = {2006},
     doi = {10.1016/j.crhy.2006.10.006},
     language = {en},
}