%0 Journal Article
%A Laurent Pain
%A Serge Tedesco
%A Christophe Constancias
%T Direct write lithography: the global solution for R&D and manufacturing
%J Comptes Rendus. Physique
%D 2006
%P 910-923
%V 7
%N 8
%I Elsevier
%R 10.1016/j.crhy.2006.10.003
%G en
%F CRPHYS_2006__7_8_910_0