@article{CRPHYS_2006__7_8_924_0,
     author = {B\'en\'edicte Mortini},
     title = {Photosensitive resists for optical lithography},
     journal = {Comptes Rendus. Physique},
     pages = {924--930},
     publisher = {Elsevier},
     volume = {7},
     number = {8},
     year = {2006},
     doi = {10.1016/j.crhy.2006.10.010},
     language = {en},
}