@article{CRPHYS_2006__7_8_931_0,
     author = {Stephen Knight and Ronald Dixson and Ronald L. Jones and Eric K. Lin and Ndubuisi G. Orji and R. Silver and John S. Villarrubia and Andr\'as E. Vlad\'ar and Wen-li Wu},
     title = {Advanced metrology needs for nanoelectronics lithography},
     journal = {Comptes Rendus. Physique},
     pages = {931--941},
     publisher = {Elsevier},
     volume = {7},
     number = {8},
     year = {2006},
     doi = {10.1016/j.crhy.2006.10.004},
     language = {en},
}