%0 Journal Article
%A Stephen Knight
%A Ronald Dixson
%A Ronald L. Jones
%A Eric K. Lin
%A Ndubuisi G. Orji
%A R. Silver
%A John S. Villarrubia
%A András E. Vladár
%A Wen-li Wu
%T Advanced metrology needs for nanoelectronics lithography
%J Comptes Rendus. Physique
%D 2006
%P 931-941
%V 7
%N 8
%I Elsevier
%R 10.1016/j.crhy.2006.10.004
%G en
%F CRPHYS_2006__7_8_931_0