Comptes Rendus
no. 12
A modeling and vibration analysis of a piezoelectric micro-pump diaphragm
Samira Kaviani1 ; Mohsen Bahrami1  ; Amir Monemian Esfahani1 ; Behzad Parsi1
1 Dept. of Mechanical Engineering, Amirkabir University of Technology (Tehran Polytechnic), Tehran, Iran
Comptes Rendus. Mécanique, Volume 342 (2014) no. 12, pp. 692-699.

The vibration analysis of a micro-pump diaphragm is presented. A piezoelectric micro-pump is studied. For this purpose, a dynamic model of the micro-pump is derived. The micro-pump diaphragm is modeled as circular double membranes, a piezoelectric one as actuator and a silicon one for representing the membrane for pumping action. The damping effect of the fluid is introduced into the equations. Vibration analysis is established by explicitly solving the dynamic model. The natural frequencies and mode shapes are calculated. The orthogonality conditions of the system are discussed. To verify the results, the finite-element micro-pump model is developed in ANSYS software package. The results show that the two methods are well comparable.

Reçu le :
Accepté le :
Publié le :
DOI : 10.1016/j.crme.2014.06.005
Mots clés : Piezoelectric micro-pump, Diaphragm, Vibration analysis, Micro-electromechanical system, Finite element analysis, Orthogonality
Samira Kaviani 1 ; Mohsen Bahrami 1 ; Amir Monemian Esfahani 1 ; Behzad Parsi 1

1 Dept. of Mechanical Engineering, Amirkabir University of Technology (Tehran Polytechnic), Tehran, Iran 
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Samira Kaviani; Mohsen Bahrami; Amir Monemian Esfahani; Behzad Parsi. A modeling and vibration analysis of a piezoelectric micro-pump diaphragm. Comptes Rendus. Mécanique, Volume 342 (2014) no. 12, pp. 692-699. doi : 10.1016/j.crme.2014.06.005. https://comptes-rendus.academie-sciences.fr/mecanique/articles/10.1016/j.crme.2014.06.005/

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