L'étude des écoulements de gaz dans les microsystèmes nécessite la prise en compte des effets de raréfaction. Après avoir présenté les échelles de longueur caractéristiques des micro-écoulements gazeux et défini les différents régimes d'écoulement rencontrés, nous exposons les méthodes analytiques de calcul du régime d'écoulement glissant, le plus fréquemment rencontré dans les microsystèmes fluidiques. Les différentes méthodes de résolution numérique des micro-écoulements gazeux sont ensuite passées en revue, avec une attention particulière pour la simulation directe de Monte Carlo. La dernière partie est consacrée à quelques applications spécifiques de micropompage d'origine thermique liées à la raréfaction des écoulements.
Studying gaseous flows in microsystems requires that rarefaction effects be taken into account. The significant length scales for gaseous microflows and the encountered flow regimes are presented. The analytical methods for the modeling of the slip flow regime, frequent in microfluidic applications, are detailed. Numerical methods for the simulation of micro gaseous flows are also examined, with emphasis on the Direct Simulation Monte Carlo method. Finally, some specific applications of thermal micropumping based on rarefaction effects are presented.
Keywords: Rarefaction, Microfluidics, Knudsen number, Slip flow, Thermal micropumping
Stéphane Colin 1 ; Lucien Baldas 1
@article{CRPHYS_2004__5_5_521_0, author = {St\'ephane Colin and Lucien Baldas}, title = {Effets de rar\'efaction dans les micro-\'ecoulements gazeux}, journal = {Comptes Rendus. Physique}, pages = {521--530}, publisher = {Elsevier}, volume = {5}, number = {5}, year = {2004}, doi = {10.1016/j.crhy.2004.04.005}, language = {fr}, }
Stéphane Colin; Lucien Baldas. Effets de raréfaction dans les micro-écoulements gazeux. Comptes Rendus. Physique, Volume 5 (2004) no. 5, pp. 521-530. doi : 10.1016/j.crhy.2004.04.005. https://comptes-rendus.academie-sciences.fr/physique/articles/10.1016/j.crhy.2004.04.005/
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