Spatial Atomic Layer Deposition (SALD), an emerging tool for energy materials. Application to new-generation photovoltaic devices and transparent conductive materials

David Muñoz-Rojas; Viet Huong Nguyen; César Masse de la Huerta; Sara Aghazadehchors; Carmen Jiménez; Daniel Bellet

Comptes Rendus. Physique, Volume 18 (2017) p. 391-400