Cross-Sectional Nanoindentation (CSN) is a recent method for adhesion measurement of nanoscale thin films in Ultra-Large Scale Integrated circuits. In the case of ductile thin films, the motion of the substrate chip implies significant plastic deformation of the film and complex geometry of delaminated areas. This article recalls first the experimental procedure and the two main features observed in this test performed on various plane copper films deposited on silicon: the critical force producing silicon edge chipping increases linearly with the distance of the indenter to the interface; on the section the delaminated length of the film () is proportional to the residual silicon chip displacement and the ratio depends on the manufacturing process of the film, and is so related to its adhesion to the substrate. One proposes a simple analysis of the silicon edge chipping. Then a model of pull-off of an elastic-strain hardening plastic film is developed, which suggests an explanation for the delamination process. Application of the model to experimental results starting from films plastic properties deduced from nanoindentation measurements provides plausible results. Some improvements for performing the CSN test are proposed in order to make easier its interpretation.
@article{CRMECA_2011__339_7-8_443_0,
author = {Eric Felder and S\'ebastien Roy and Evelyne Darque-Ceretti},
title = {Characterization of the adhesion of thin film by {Cross-Sectional} {Nanoindentation} {Analysis} of the substrate edge chipping and the film delamination},
journal = {Comptes Rendus. M\'ecanique},
pages = {443--457},
publisher = {Elsevier},
volume = {339},
number = {7-8},
year = {2011},
doi = {10.1016/j.crme.2011.05.003},
language = {en},
}
TY - JOUR AU - Eric Felder AU - Sébastien Roy AU - Evelyne Darque-Ceretti TI - Characterization of the adhesion of thin film by Cross-Sectional Nanoindentation Analysis of the substrate edge chipping and the film delamination JO - Comptes Rendus. Mécanique PY - 2011 SP - 443 EP - 457 VL - 339 IS - 7-8 PB - Elsevier DO - 10.1016/j.crme.2011.05.003 LA - en ID - CRMECA_2011__339_7-8_443_0 ER -
%0 Journal Article %A Eric Felder %A Sébastien Roy %A Evelyne Darque-Ceretti %T Characterization of the adhesion of thin film by Cross-Sectional Nanoindentation Analysis of the substrate edge chipping and the film delamination %J Comptes Rendus. Mécanique %D 2011 %P 443-457 %V 339 %N 7-8 %I Elsevier %R 10.1016/j.crme.2011.05.003 %G en %F CRMECA_2011__339_7-8_443_0
Eric Felder; Sébastien Roy; Evelyne Darque-Ceretti. Characterization of the adhesion of thin film by Cross-Sectional Nanoindentation Analysis of the substrate edge chipping and the film delamination. Comptes Rendus. Mécanique, Volume 339 (2011) no. 7-8, pp. 443-457. doi : 10.1016/j.crme.2011.05.003. https://comptes-rendus.academie-sciences.fr/mecanique/articles/10.1016/j.crme.2011.05.003/
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