Comptes Rendus
dc SQUIDs as linear displacement detectors for embedded micromechanical resonators
[Détection linéaire des déplacements dʼun microrésonateur mécanique à lʼaide dʼun SQUID]
Comptes Rendus. Physique, Volume 12 (2011) no. 9-10, pp. 817-825.

Les magnétomètres à base de SQUID (Superconducting QUantum Interference Device) sont sensibles à de très faibles variations de flux magnétique et sont ainsi utilisés pour lʼétude dʼeffets quantiques à lʼéchelle macroscopique. Nous avons réalisé une mesure linéaire du déplacement dʼun microrésonateur mécanique enchâssé dans la boucle supraconductrice dʼun dc SQUID. En utilisant un fort champ magnétique et un amplificateur fonctionnant en régime cryogénique, cette méthode de mesure nous a permis dʼatteindre une résolution qui nʼest que 4,4 fois la limite quantique.

Superconducting quantum interference devices (SQUIDs) can detect tiny amounts of magnetic flux and are also used to study macroscopic quantum effects. We employ a dc SQUID as a linear detector of the displacement of an embedded micromechanical resonator with a femtometer sensitivity. We discuss the measurement method, including operation in high magnetic field and a cryogenic amplification scheme which allows us to reach a resolution which is only a factor 4.4 above the standard quantum limit.

Reçu le :
Accepté le :
Publié le :
DOI : 10.1016/j.crhy.2011.10.005
Keywords: NEMS, MEMS, QEMS, SQUID
Mot clés : NEMS, MEMS, QEMS, SQUID

Samir Etaki 1, 2 ; Menno Poot 1 ; Koji Onomitsu 2 ; Hiroshi Yamaguchi 2 ; Herre S.J. van der Zant 1

1 Kavli Institute of Nanoscience, Delft University of Technology, P.O.B. 5046, 2600GA Delft, The Netherlands
2 NTT Basic Research Laboratories, NTT Corporation, Atsugi-shi, Kanagawa 243-0198, Japan
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     author = {Samir Etaki and Menno Poot and Koji Onomitsu and Hiroshi Yamaguchi and Herre S.J. van der Zant},
     title = {dc {SQUIDs} as linear displacement detectors for embedded micromechanical resonators},
     journal = {Comptes Rendus. Physique},
     pages = {817--825},
     publisher = {Elsevier},
     volume = {12},
     number = {9-10},
     year = {2011},
     doi = {10.1016/j.crhy.2011.10.005},
     language = {en},
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Samir Etaki; Menno Poot; Koji Onomitsu; Hiroshi Yamaguchi; Herre S.J. van der Zant. dc SQUIDs as linear displacement detectors for embedded micromechanical resonators. Comptes Rendus. Physique, Volume 12 (2011) no. 9-10, pp. 817-825. doi : 10.1016/j.crhy.2011.10.005. https://comptes-rendus.academie-sciences.fr/physique/articles/10.1016/j.crhy.2011.10.005/

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