Micro electromechanical systems (MEMS) and mechanical effects of quantum fluctuations become strongly related. MEMS have allowed the production of important experimental results such as quantitative measurements of the Casimir force at the micro- and nanoscales. MEMS are used to probe these effects because they are sensitive to them and engineers will certainly have to increasingly consider the effects of quantum and thermal fluctuations in the design of MEMS that are used as actuators and sensors. These effects on MEMS are controlled by the electron–photon coupling. These questions are then coupled to new fields of research, such as photonics and plasmonics.
Les microsystèmes électromécaniques (MEMS) et les effets mécaniques dus aux fluctuations quantiques sont fortement reliés. Les MEMS ont permis la mesure quantitative de la force de Casimir à lʼéchelle micro et nanomètrique. Si les MEMS sont une bonne sonde de ces effets, cʼest parce quʼils y sont très sensibles et cela signifie la nécessité pour les ingénieurs de mieux prendre en compte à lʼavenir lʼeffet des fluctuations quantiques ou thermiques sur les MEMS utilisés comme capteurs ou actionneurs. Ces effets sont dus aux propriétés du couplage électron–photon et ces questions sont ainsi liées à la plasmonique et à la photonique.
Joël Chevrier 1
@article{CRPHYS_2011__12_9-10_898_0,
author = {Jo\"el Chevrier},
title = {Presence of electromagnetic fluctuations in micromechanics},
journal = {Comptes Rendus. Physique},
pages = {898--907},
publisher = {Elsevier},
volume = {12},
number = {9-10},
year = {2011},
doi = {10.1016/j.crhy.2011.10.014},
language = {en},
}
Joël Chevrier. Presence of electromagnetic fluctuations in micromechanics. Comptes Rendus. Physique, Nano- and micro-optomechanical systems, Volume 12 (2011) no. 9-10, pp. 898-907. doi : 10.1016/j.crhy.2011.10.014. https://comptes-rendus.academie-sciences.fr/physique/articles/10.1016/j.crhy.2011.10.014/
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That MEMS are of increasing importance is illustrated by smartphones which contain highly sophisticated MEMS such as a 3D gyroscope and an accelerometer similar to the one found in Airbag sensors.
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