Dynamics and instability of solid-state dewetting

Fabien Cheynis; Frédéric Leroy; Pierre Müller

doi:10.1016/j.crhy.2013.06.006

Trends and perspectives in solid-state wetting / Mouillage solide–solide : tendances et perspectives

Dynamics and instability of solid-state dewetting
[Démouillage à lʼétat solide : dynamique et instabilités]

Fabien Cheynis ¹ ; Frédéric Leroy ¹ ; Pierre Müller ¹

¹ Aix–Marseille University, CINaM UMR CNRS 7325, case 913, campus de Luminy, 13288 Marseille cedex, France

Comptes Rendus. Physique, Trends and perspectives in solid-state wetting / Mouillage solide-solide : tendances et perspectives, Volume 14 (2013) no. 7, pp. 578-589.

Résumé
Abstract

Le démouillage spontané de films minces solides sʼeffectue par retractation des bords du film et/ou par croissance hétérogènes de lacunes. Les modèles classiques continus décrivant le démouillage sont basés sur la diffusion de surface et prédisent des lois de comportement universelles. Nous décrivons quelques unes de ces prédictions et les comparons à de récents résultats expérimentaux obtenus sur des films monocristallins de Si(001)/SiO₂ et de Ge(001)/SiO₂ étudiés par micoscopie à électrons lents (LEEM) in-situ et par microscopie à force atomique (AFM) ex-situ. Les résultats expérimentaux ainsi obtenus diffèrent des prédictions théoriques. Plus précisément, à cause de lʼanisotropie cristalline : (i) les fronts de démouillage facetés restent stables pendant le démouillage et reculent à forme constante alors que les fronts de démouillage non facettés sont instables et reculent en formant des digitations, (ii) le bourrelet qui, pour des raisons de conservation de la masse, se forme pendant le démouillage sʼépaissit via un mode de croissance couche par couche limité par la nucléation bidimensionnelle sur la face sommitale du bourrelet, (iii) le mécanisme final de génération dʼilots tridimensionnels diffère de celui prédit par les modèles continus. Nous dicutons également les mécanismes de démouillage procédant par ouverture de lacunes. Dans le cas de Si(001)/SiO₂, les lacunes de démouillage, initialement carrées, sont localement déstabilisées par les coins alors que dans le cas de Ge(001)/SiO₂, les bords des lacunes deviennent invariablement instables conduisant à la formation de dendrites dont la densité dépend de la température et de lʼépaisseur du film. Finalement, nous discutons quelques cas de films ultraminces, plus sensibles à des variations locales dʼépaisseur, et formant par démouillage des structures fractales ou labyrinthiques.

Spontaneous dewetting of solid thin films proceeds by edge retraction of film edges and/or by heterogeneous void growth. Classical 1D and 2D continuous models of the evolution of a dewetting film, based on surface diffusion mechanisms, predict that in the long-time limit dewetting obeys universal scaling laws. In this paper, we review 1D and 2D predictions and recent experimental results. For this purpose, using Si(001)/SiO₂ and Ge(001)/SiO₂ single-crystalline thin films in different geometries, we have been able to compare theoretical predictions to experimental results obtained by combining in situ LEEM and ex situ AFM measurements. For dewetting from film edges, experimental results partially differ from continuous models predictions. More precisely, because of the crystallographic anisotropy: (i) the facetted edges remain stable during dewetting (they simply recede at constant shape) while poorly or un-facetted edges are unstable (they recede by finger formation); (ii) rim formation, induced by mass-conservation condition, proceeds in a layer-by-layer mode and is limited by 2D nucleation properties on the top of the rim; (iii) the island generation mechanism differs from the mass shedding behaviour predicted by 1D models. For dewetting mechanisms involving void growth, different behaviours are reported and discussed. For thin Si(001)/SiO₂ films, the corners of the opening square-shaped voids lead to a local destabilisation of the growing voids. For thin Ge(001)/SiO₂ films, the side of the voids invariably turns instable and forms tip dendrites whose branch density depends on the temperature and the initial film thickness. Finally, ultra-thin films, more sensitive to local fluctuations, dewet in a fractal geometry.

Publié le : 2013-07-16

DOI : 10.1016/j.crhy.2013.06.006

Keywords: Solid-state dewetting, Surface diffusion, Dewetting dynamics, Instabilities, SOI, GeOI
Mots-clés : Mouillage à lʼétat solide, Diffusion en surface, Dynamique du démouillage, Instabilités, SOI, GeOI

Affiliations des auteurs :

Fabien Cheynis ¹ ; Frédéric Leroy ¹ ; Pierre Müller ¹

¹ Aix–Marseille University, CINaM UMR CNRS 7325, case 913, campus de Luminy, 13288 Marseille cedex, France

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Fabien Cheynis; Frédéric Leroy; Pierre Müller. Dynamics and instability of solid-state dewetting. Comptes Rendus. Physique, Trends and perspectives in solid-state wetting / Mouillage solide-solide : tendances et perspectives, Volume 14 (2013) no. 7, pp. 578-589. doi : 10.1016/j.crhy.2013.06.006. https://comptes-rendus.academie-sciences.fr/physique/articles/10.1016/j.crhy.2013.06.006/

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