A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response

Aziz Ettouhami; Noureddine Zahid; Mourad Elbelkacemi

doi:10.1016/j.crme.2003.10.001

A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response

Presented by: Évariste Sanchez-Palencia

Aziz Ettouhami ¹; Noureddine Zahid ¹; Mourad Elbelkacemi ¹

¹ Laboratoire conception et systèmes, faculté des sciences, Université Mohammed V, avenue Ibn Battouta, BP 1014, Rabat, Morocco

Comptes Rendus. Mécanique, Volume 332 (2004) no. 2, pp. 141-146.

Abstract
Résumé

This paper describes a new capacitive structure of pressure sensor to increase simultaneously the sensitivity and the linearity of the transducer. This structure contains two capacitors which change in response to pressure, but in opposite senses. To increase even more the sensitivity of each capacitor, the pressure sensitive diaphragm carries a central boss. The optimal position and the length of the boss are also calculated.

Une nouvelle structure de capteur de pression capacitif permettant d'augmenter simultanément la sensibilité et la linéarité du transducteur a été proposée. Cette structure contient deux condensateurs qui varient avec la pression mais dans des sens opposés. Pour augmenter davantage la sensibilité de chaque condensateur, la membrane sensible à la pression porte une bosse au centre. La position optimale et la longueur de la bosse sont également calculées.

Received: 2003-06-20
Accepted: 2003-10-07
Published online: 2004-01-29

DOI: 10.1016/j.crme.2003.10.001

Keywords: Control, Capacitive pressure sensor, Linearity, Sensitivity
Mot clés : Automatique, Capteur de pression capacitif, Linéarité, Sensibilité

Author's affiliations:

Aziz Ettouhami ¹; Noureddine Zahid ¹; Mourad Elbelkacemi ¹

¹ Laboratoire conception et systèmes, faculté des sciences, Université Mohammed V, avenue Ibn Battouta, BP 1014, Rabat, Morocco

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     title = {A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response},
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     pages = {141--146},
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     number = {2},
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     doi = {10.1016/j.crme.2003.10.001},
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Aziz Ettouhami; Noureddine Zahid; Mourad Elbelkacemi. A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response. Comptes Rendus. Mécanique, Volume 332 (2004) no. 2, pp. 141-146. doi : 10.1016/j.crme.2003.10.001. https://comptes-rendus.academie-sciences.fr/mecanique/articles/10.1016/j.crme.2003.10.001/

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