[Une nouvelle structure de capteur de pression capacitif avec haute sensibilitée et réponse quasi-linéaire]
Une nouvelle structure de capteur de pression capacitif permettant d'augmenter simultanément la sensibilité et la linéarité du transducteur a été proposée. Cette structure contient deux condensateurs qui varient avec la pression mais dans des sens opposés. Pour augmenter davantage la sensibilité de chaque condensateur, la membrane sensible à la pression porte une bosse au centre. La position optimale et la longueur de la bosse sont également calculées.
This paper describes a new capacitive structure of pressure sensor to increase simultaneously the sensitivity and the linearity of the transducer. This structure contains two capacitors which change in response to pressure, but in opposite senses. To increase even more the sensitivity of each capacitor, the pressure sensitive diaphragm carries a central boss. The optimal position and the length of the boss are also calculated.
Accepté le :
Publié le :
Mot clés : Automatique, Capteur de pression capacitif, Linéarité, Sensibilité
@article{CRMECA_2004__332_2_141_0,
author = {Aziz Ettouhami and Noureddine Zahid and Mourad Elbelkacemi},
title = {A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response},
journal = {Comptes Rendus. M\'ecanique},
pages = {141--146},
publisher = {Elsevier},
volume = {332},
number = {2},
year = {2004},
doi = {10.1016/j.crme.2003.10.001},
language = {en},
}
TY - JOUR AU - Aziz Ettouhami AU - Noureddine Zahid AU - Mourad Elbelkacemi TI - A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response JO - Comptes Rendus. Mécanique PY - 2004 SP - 141 EP - 146 VL - 332 IS - 2 PB - Elsevier DO - 10.1016/j.crme.2003.10.001 LA - en ID - CRMECA_2004__332_2_141_0 ER -
%0 Journal Article %A Aziz Ettouhami %A Noureddine Zahid %A Mourad Elbelkacemi %T A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response %J Comptes Rendus. Mécanique %D 2004 %P 141-146 %V 332 %N 2 %I Elsevier %R 10.1016/j.crme.2003.10.001 %G en %F CRMECA_2004__332_2_141_0
Aziz Ettouhami; Noureddine Zahid; Mourad Elbelkacemi. A novel capacitive pressure sensor structure with high sensitivity and quasi-linear response. Comptes Rendus. Mécanique, Volume 332 (2004) no. 2, pp. 141-146. doi : 10.1016/j.crme.2003.10.001. https://comptes-rendus.academie-sciences.fr/mecanique/articles/10.1016/j.crme.2003.10.001/
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