Laser terahertz emission microscopy

Hironaru Murakami; Masayoshi Tonouchi

doi:10.1016/j.crhy.2007.07.010

Laser terahertz emission microscopy
[Microscopie à émission térahertz photodéclenchée]

Hironaru Murakami ¹ ; Masayoshi Tonouchi ¹

¹ Institute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, Osaka, 565-0871, Japan

Comptes Rendus. Physique, Volume 9 (2008) no. 2, pp. 169-183.

Résumé
Abstract

Nous présentons une revue des recherches concernant la microscopie à émission térahertz photo-déclenchée. Des impulsions lasers de durée femtoseconde peuvent générer des ondes THz dans la plupart des semi-conducteurs de l'électronique, par l'intermédiaire du courant impulsionnel photogénéré. Ce courant est produit par l'accélération des photo-porteurs, et la microscopie à émission THz permet une visualisation résolue en temps de ce courant, donc du champ électrique à la surface des échantillons. Nous avons construit des sondes permettant un balayage spatial travaillant en mode de réflexion ou de transmission. Les systèmes réalisés montrent une résolution spatiale minimum meilleure que 2 μm, qui est définie par la taille du spot laser. Nous présentons quelques exemples d'application de ce microscope telle que l'imagerie de domaines ferroélectriques, la distribution quantitative du super-courant dans les supraconducteurs à haut $T_{c}$ , la détection de défauts dans des structures CMOS et la visualisation de la réponse de matériaux et dispositifs.

Laser terahertz (THz) emission microscopy (LTEM) is reviewed. Femtosecond lasers can excite THz waves in various electronic materials due to ultrafast current modulation. The current modulation is realized by the acceleration or deceleration of photo-excited carriers, and thus LTEM visualizes the dynamic photo-response of substances. We construct a free-space type and scanning probe type with transmission or reflection modes. The developed systems have a minimum spatial resolution better than 2 μm, which is defined by the laser beam diameter. We present some examples of LTEM applications, such as ferroelectric domain imaging, quantitative supercurrent distribution in high- $T_{c}$ superconductors, defect detection of MOS devices as well as the visualization of the photo-responses in materials and devices.

Publié le : 2008-01-10

DOI : 10.1016/j.crhy.2007.07.010

Keywords: Terahertz emission, Scanning laser imaging, BiFeO, Superconductors, LSI
Mot clés : Émission térahertz, Imagerie laser à balayage, BiFeO, Supraconducteurs, LSI

Affiliations des auteurs :

Hironaru Murakami ¹ ; Masayoshi Tonouchi ¹

¹ Institute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, Osaka, 565-0871, Japan

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     title = {Laser terahertz emission microscopy},
     journal = {Comptes Rendus. Physique},
     pages = {169--183},
     publisher = {Elsevier},
     volume = {9},
     number = {2},
     year = {2008},
     doi = {10.1016/j.crhy.2007.07.010},
     language = {en},
}

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Hironaru Murakami; Masayoshi Tonouchi. Laser terahertz emission microscopy. Comptes Rendus. Physique, Volume 9 (2008) no. 2, pp. 169-183. doi : 10.1016/j.crhy.2007.07.010. https://comptes-rendus.academie-sciences.fr/physique/articles/10.1016/j.crhy.2007.07.010/

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