L'évolution récente des MET permet d'explorer les nanostructures à l'échelle de l'atome. Cependant, les images obtenues ne sont que des projections bidimensionnelles d'objets 3D. La tomographie électronique permet de pallier cette limitation et se concentre de plus en plus sur les mesures quantitatives. De plus, la résolution atomique en 3D représentait depuis longtemps le but ultime en tomographie. Il est donc nécessaire d'optimiser l'acquisition des données, les techniques de reconstruction 3D ainsi que les méthodes de quantification. Nous allons passer en revue différentes méthodologies et exemples. Nous discuterons ensuite des perspectives et des nouveaux défis à relever dans ce domaine.
Modern TEM enables the investigation of nanostructures at the atomic scale. However, TEM images are only two-dimensional (2D) projections of a three-dimensional (3D) object. Electron tomography can overcome this limitation. The technique is increasingly focused towards quantitative measurements and reaching atomic resolution in 3D has been the ultimate goal for many years. Therefore, one needs to optimize the acquisition of the data, the 3D reconstruction techniques as well as the quantification methods. Here, we will review a broad range of methodologies and examples. Finally, we will provide an outlook and will describe future challenges in the field of electron tomography.
Mot clés : Tomographie électronique, Résolution atomique, Reconstruction en trois dimensions, Nanostructures
Sara Bals 1 ; Bart Goris 1 ; Thomas Altantzis 1 ; Hamed Heidari 1 ; Sandra Van Aert 1 ; Gustaaf Van Tendeloo 1
@article{CRPHYS_2014__15_2-3_140_0, author = {Sara Bals and Bart Goris and Thomas Altantzis and Hamed Heidari and Sandra Van Aert and Gustaaf Van Tendeloo}, title = {Seeing and measuring in {3D} with electrons}, journal = {Comptes Rendus. Physique}, pages = {140--150}, publisher = {Elsevier}, volume = {15}, number = {2-3}, year = {2014}, doi = {10.1016/j.crhy.2013.09.015}, language = {en}, }
TY - JOUR AU - Sara Bals AU - Bart Goris AU - Thomas Altantzis AU - Hamed Heidari AU - Sandra Van Aert AU - Gustaaf Van Tendeloo TI - Seeing and measuring in 3D with electrons JO - Comptes Rendus. Physique PY - 2014 SP - 140 EP - 150 VL - 15 IS - 2-3 PB - Elsevier DO - 10.1016/j.crhy.2013.09.015 LA - en ID - CRPHYS_2014__15_2-3_140_0 ER -
%0 Journal Article %A Sara Bals %A Bart Goris %A Thomas Altantzis %A Hamed Heidari %A Sandra Van Aert %A Gustaaf Van Tendeloo %T Seeing and measuring in 3D with electrons %J Comptes Rendus. Physique %D 2014 %P 140-150 %V 15 %N 2-3 %I Elsevier %R 10.1016/j.crhy.2013.09.015 %G en %F CRPHYS_2014__15_2-3_140_0
Sara Bals; Bart Goris; Thomas Altantzis; Hamed Heidari; Sandra Van Aert; Gustaaf Van Tendeloo. Seeing and measuring in 3D with electrons. Comptes Rendus. Physique, Volume 15 (2014) no. 2-3, pp. 140-150. doi : 10.1016/j.crhy.2013.09.015. https://comptes-rendus.academie-sciences.fr/physique/articles/10.1016/j.crhy.2013.09.015/
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