Elemental analysis down to the single atom with electron beams

Kazu Suenaga

doi:10.1016/j.crhy.2013.12.003

Electron microscopy / Microscopie électronique

Elemental analysis down to the single atom with electron beams

Kazu Suenaga ¹

¹Nanotube Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Central 5, 1-1-1 Higashi, Tsukuba 305-8565, Japan

Part of the special issue:

Comptes Rendus. Physique, Seeing and measuring with electrons: Transmission Electron Microscopy today and tomorrow, Volume 15 (2014) no. 2-3, pp. 151-157

Abstract (Original language)
Résumé

Recently the possibilities of chemical analysis by means of electron energy-loss spectroscopy (EELS) and energy dispersive X-ray spectroscopy (EDX) have been pushed to the single atom limit. Here we show examples for successful single-atom spectroscopy in low-dimensional materials using scanning transmission electron microscopy (STEM) together with EELS and EDX.

Au cours des années récentes, les techniques d'analyse spectroscopique de perte d'énergie (EELS) et d'émission X (EDX) ont été poussées jusqu'à l'identification d'atomes individuels. Nous présentons ici une sélection de résultats récents acquis en microscopie électronique à balayage en transmission (STEM) équipée pour les spectroscopies EELS et EDX, qui montrent des succès enregistrés sur des atomes uniques au sein de matériaux de basse dimensionnalité.

Published online: 2014-01-27

DOI: 10.1016/j.crhy.2013.12.003

Keywords: STEM, EELS, EDX, Single atom spectroscopy, Low-dimension materials
Mots-clés : STEM, Spectroscopie de perte d'énergie, Analyse dispersive en énergie, Spectroscopie d'atome unique, Matériaux à basse dimension

Author's affiliations:

Kazu Suenaga ¹

¹ Nanotube Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Central 5, 1-1-1 Higashi, Tsukuba 305-8565, Japan

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Kazu Suenaga. Elemental analysis down to the single atom with electron beams. Comptes Rendus. Physique, Seeing and measuring with electrons: Transmission Electron Microscopy today and tomorrow, Volume 15 (2014) no. 2-3, pp. 151-157. doi: 10.1016/j.crhy.2013.12.003

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