Comptes Rendus
Electron microscopy / Microscopie électronique
Elemental analysis down to the single atom with electron beams
[Analyse élémentaire d'un atome individuel avec un faisceau d'électrons]
Comptes Rendus. Physique, Volume 15 (2014) no. 2-3, pp. 151-157.

Au cours des années récentes, les techniques d'analyse spectroscopique de perte d'énergie (EELS) et d'émission X (EDX) ont été poussées jusqu'à l'identification d'atomes individuels. Nous présentons ici une sélection de résultats récents acquis en microscopie électronique à balayage en transmission (STEM) équipée pour les spectroscopies EELS et EDX, qui montrent des succès enregistrés sur des atomes uniques au sein de matériaux de basse dimensionnalité.

Recently the possibilities of chemical analysis by means of electron energy-loss spectroscopy (EELS) and energy dispersive X-ray spectroscopy (EDX) have been pushed to the single atom limit. Here we show examples for successful single-atom spectroscopy in low-dimensional materials using scanning transmission electron microscopy (STEM) together with EELS and EDX.

Publié le :
DOI : 10.1016/j.crhy.2013.12.003
Keywords: STEM, EELS, EDX, Single atom spectroscopy, Low-dimension materials
Mot clés : STEM, Spectroscopie de perte d'énergie, Analyse dispersive en énergie, Spectroscopie d'atome unique, Matériaux à basse dimension
Kazu Suenaga 1

1 Nanotube Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Central 5, 1-1-1 Higashi, Tsukuba 305-8565, Japan
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Kazu Suenaga. Elemental analysis down to the single atom with electron beams. Comptes Rendus. Physique, Volume 15 (2014) no. 2-3, pp. 151-157. doi : 10.1016/j.crhy.2013.12.003. https://comptes-rendus.academie-sciences.fr/physique/articles/10.1016/j.crhy.2013.12.003/

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