Comptes Rendus
no. 5-6
High energy X-ray micro-optics
[Micro-optique pour rayons X de haute énergie]
Anatoly Snigirev1  ; Irina Snigireva1
1 European Synchrotron Radiation Facility ESRF, 38043 Grenoble, France
Comptes Rendus. Physique, Volume 9 (2008) no. 5-6, pp. 507-516.

Pendant la dernière décennie, des progrès énormes ont été accomplis dans le domaine de l'optique des rayons X. Ces progrès découlent des propriétés uniques des faisceaux X produits par les sources synchrotron de troisième génération, dont la faible émittance, couplée à une brillance élevée, permet le développement de dispositifs de focalisation efficaces pour de nouvelles techniques de microscopie X. Cet article donne un aperçu de l'état de l'art des optiques microfocalisantes et des méthodes pour les rayons X durs. L'accent est mis sur les méthodes visant à produire une résolution submicrométrique, voire nanométrique. Ces méthodes se rangent dans trois grandes catégories : réflexion, réfraction et diffraction.

Nous présentons les principes de base et des résultats récents pour chaque dispositif optique.

A tremendous progress in X-ray optics development was made in the past decade. Progress has been driven by the unique properties of X-ray beams produced by third generation synchrotron sources. The very low emittance coupled with high brilliance allows one to develop efficient focusing devices for new X-ray microscopy techniques. This article provides an overview of the state-of-the-art in micro-focusing optics and methods for hard X-rays. The main emphasis is put on those methods which aim to produce submicron and nanometer resolution. These methods fall into three broad categories: reflective, refractive and diffractive optics.

The basic principles and recent achievements are discussed for all optical devices.

Publié le :
DOI : 10.1016/j.crhy.2008.02.003
Keywords: X-ray micro-optics, Kirkpatrick–Baez mirrors, Fresnel zone plates, Waveguides, Capillaries, Refractive lenses
Mot clés : Micro-optique pour rayons X, Miroirs Kirkpatrick–Baez, Réseau zoné de Fresnel, Guide d'ondes, Tube capillaire, Objectif réfractif
Anatoly Snigirev 1 ; Irina Snigireva 1

1 European Synchrotron Radiation Facility ESRF, 38043 Grenoble, France 
@article{CRPHYS_2008__9_5-6_507_0,
     author = {Anatoly Snigirev and Irina Snigireva},
     title = {High energy {X-ray} micro-optics},
     journal = {Comptes Rendus. Physique},
     pages = {507--516},
     publisher = {Elsevier},
     volume = {9},
     number = {5-6},
     year = {2008},
     doi = {10.1016/j.crhy.2008.02.003},
     language = {en},
}
TY  - JOUR
AU  - Anatoly Snigirev
AU  - Irina Snigireva
TI  - High energy X-ray micro-optics
JO  - Comptes Rendus. Physique
PY  - 2008
SP  - 507
EP  - 516
VL  - 9
IS  - 5-6
PB  - Elsevier
DO  - 10.1016/j.crhy.2008.02.003
LA  - en
ID  - CRPHYS_2008__9_5-6_507_0
ER  - 
%0 Journal Article
%A Anatoly Snigirev
%A Irina Snigireva
%T High energy X-ray micro-optics
%J Comptes Rendus. Physique
%D 2008
%P 507-516
%V 9
%N 5-6
%I Elsevier
%R 10.1016/j.crhy.2008.02.003
%G en
%F CRPHYS_2008__9_5-6_507_0
Anatoly Snigirev; Irina Snigireva. High energy X-ray micro-optics. Comptes Rendus. Physique, Volume 9 (2008) no. 5-6, pp. 507-516. doi : 10.1016/j.crhy.2008.02.003. https://comptes-rendus.academie-sciences.fr/physique/articles/10.1016/j.crhy.2008.02.003/

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