Published online: 2006-10-01
DOI: 10.1016/j.crhy.2006.10.009

Glossary. Comptes Rendus. Physique, Ultimate lithography, Volume 7 (2006) no. 8, pp. 841-843. doi: 10.1016/j.crhy.2006.10.009

@misc{CRPHYS_2006__7_8_841_0,
     title = {Glossary},
     journal = {Comptes Rendus. Physique},
     pages = {841--843},
     year = {2006},
     publisher = {Elsevier},
     volume = {7},
     number = {8},
     doi = {10.1016/j.crhy.2006.10.009},
     language = {en},
}

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PB  - Elsevier
DO  - 10.1016/j.crhy.2006.10.009
LA  - en
ID  - CRPHYS_2006__7_8_841_0
ER  - 

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